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Germane Mix

GeH4

To provide concentrations less than 100%, germane can be diluted with argon, helium, hydrogen, or nitrogen. Particularly when relatively small amounts of germanium need to be deposited, the use of this form of germanium can add an extra degree of control to the process.

Physical Parameters

Container Information
Gas cylinder connector: CGA-350

Dopant concentration can be mixed with equilibrium gas phase of UHP or VLSI grade.

Germanium alkane concentration Cylinder Size Pressure(pounds per square foot) Argon Helium Hydrogen Nitrogen
ft3 m3 ft3 m3 ft3 m3 ft3 m3
5ppm – 2% 044

016

1500

1500

167

63

4.7

1.8

146

55

4.1

1.6

146

55

4.1

1.6

156

58

4.4

1.7

Applications

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